Investigations in the field of material science, microelectronics, products composition control, legal expertise.
Manufacturer: Rigaku Corporation, Japan
Year:  2010
Location:  284
| Main features: | |
| Power of Mo and Cu X-ray tubes: | 0.05 kW | 
| Elemental range: | from Al to U | 
| Sensitivity: | 10-7 wt.% | 
| Glancing angle range: | 0—2° | 
| Angular scanning resolution: | 0.01° | 
| Radiation penetration depth: | up to 500 nm | 
| Measurements in air | |
| Maximum sample size: | 100x100х5 mm | 
