Low pressure plasma system for plasma cleaning, activation, etching and coating
Manufacturer: Diener electronic (Germany)
Year: 2022
Location: 222
10,5 liters laboratory low pressure plasma cleaner ATTO with manual control is mainly used for:
small scale production, analysis (SEM, TEM), medical technology, sterilization, research and development, archaeology, textile treatment, semiconductor technology, plastic technology.
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Technical Data: |
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plasma generator: |
13,56 MHz/300 W |
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vacuum pump: |
5.4 m³/h |
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gas supply: |
2 gas channels (O2 and Ar) |
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chamber: |
glass, Ø 211 mm, L 300 mm |
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chamber material: |
borosilicate glass |
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chamber volume: |
approx. 10,5 liters |