Low pressure plasma system for plasma cleaning, activation, etching and coating


Manufacturer: Diener electronic (Germany)

Year: 2022



10,5 liters laboratory low pressure plasma cleaner ATTO with manual control is mainly used for:

small scale production, analysis (SEM, TEM), medical technology, sterilization, research and development, archaeology, textile treatment, semiconductor technology, plastic technology.

Technical Data:


plasma generator:

13,56 MHz/300 W

vacuum pump:

5.4 m³/h

gas supply:

2 gas channels (O2 and Ar)


glass, Ø 211 mm, L 300 mm

chamber material:

borosilicate glass

chamber volume:

approx. 10,5 liters