Wyko NT 1100

Samples: 

3D surface metrology: noncontact fast measurements of surface topography from nanometer scale roughness through millimeter scale steps.

 

Manufacturer: Veeco, USA
Year: 2006
Location: 229
 
Measurement techniques:  
vertical scanning interferometry  
    Z-range:  3 nm — 1 mm
phase-shifting interferometry  
    Z-range:  0.1 nm — 160 nm
   
Main features:  
Magnifications:  2.5x—100x
Lateral spatial sampling:  80 nm — 8 µm
Field of view:  50 µm — 5 mm
Auto stitching:  up to 100 mm
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