Samples:
3D surface metrology: noncontact fast measurements of surface topography from nanometer scale roughness through millimeter scale steps.
Manufacturer: Veeco, USA
Year: 2006
Location: 229
Location: 229
| Measurement techniques: | |
| vertical scanning interferometry | |
| Z-range: | 3 nm — 1 mm |
| phase-shifting interferometry | |
| Z-range: | 0.1 nm — 160 nm |
| Main features: | |
| Magnifications: | 2.5x—100x |
| Lateral spatial sampling: | 80 nm — 8 µm |
| Field of view: | 50 µm — 5 mm |
| Auto stitching: | up to 100 mm |