Sputtering of multilayer and composite metal, dielectric and magnetic films.
Manufacturer: AJA International, USA
Year: 2008
Location: room 275
| Main features: | |
| Five independent magnetron sputtering sources | (2 DC and 3 RF power) |
| Turbomolecular pumping system | |
| vacuum: | not less than 5*10–7 Torr |
| Rotating substrate holder | |
| heating: | up to 800 °C |
| Substrate holder cooled by liquid nitrogen | |
| Three independent gas feed lines | |
| Computer control system |